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发明名称
SPUTTER ION PLATING DEVICE
摘要
申请公布号
JPH0688222(A)
申请公布日期
1994.03.29
申请号
JP19930183495
申请日期
1993.06.30
申请人
NACHI FUJIKOSHI CORP
发明人
YASUOKA MANABU;KATOU NORIHIRO;OKAMURA OSAYUKI
分类号
C23C14/35;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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