发明名称 Method for fabricating a field effect transistor
摘要 In a method for fabricating a FET of the present invention, first and second side walls are formed on a side surface of a gate electrode, and two n-GaAs layers are formed on an active layer by selective growth using the side walls as a mask. After that, the side walls are removed, whereby double recesses are formed around the gate electrode.
申请公布号 US5298445(A) 申请公布日期 1994.03.29
申请号 US19930065622 申请日期 1993.05.21
申请人 NEC CORPORATION 发明人 ASANO, KAZUNORI
分类号 H01L21/20;H01L21/338;H01L29/812;(IPC1-7):H01L21/265 主分类号 H01L21/20
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