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发明名称
ROLL COATER
摘要
申请公布号
JPH0686954(A)
申请公布日期
1994.03.29
申请号
JP19920265353
申请日期
1992.09.07
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
KISE KAZUO
分类号
B05C1/02;G03F7/16;H01L21/027;(IPC1-7):B05C1/02
主分类号
B05C1/02
代理机构
代理人
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地址
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