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发明名称
METHOD AND DEVICE FOR SIMULTANEOUS FORMATION OF FILM BY SPUTTERING ON BOTH SURFACES
摘要
申请公布号
JPH0688217(A)
申请公布日期
1994.03.29
申请号
JP19920240499
申请日期
1992.09.09
申请人
HITACHI LTD
发明人
SHIMIZU TAMOTSU
分类号
C23C14/34;C23C14/35;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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