Pressure sensor for gases or liquids - has carrier plate connected to diaphragm, and electrode surfaces of plate and diaphragm on opposite sides

摘要

In the pressure sensor, the diaphragm (2) on the side facing away from the carrier plate (1) acted on by the medium to be measured, is covered with a layer unresponsive to this medium. The layer is a thin, flexible freely-moving foil (8). The foil can be made of glass or plastic with a thin metal coating. The sensor has a pot-shaped housing. The foil lies on the diaphragm and extends over its edge. This extension lies on a rigid distance ring (9) which has the same top level as the diaphragm, and at a small distance encircles the diaphragm. The diaphragm and the distance ring are separated by 10 to 200 microns. ADVANTAGE - Measuring chamber is hermetically sealed against liquid or gaseous media, with free movement of diaphragm still ensured.