Prodn of esp ferroelectric, thin layers - by vaporising material onto substrate using ion beam cluster, and heating layer produced in oxygen atmosphere

摘要

Prodn. of thin layers comprises (a) vaporising one or more vaporising materials onto a substrate using an ion cluster beam process to produce a layer on the substrate; and (b) heating the layer produced to a reqd. temp. in an O2 atmosphere contg. atomic oxygen. USE/ADVANTAGE - Esp. for prodn. of ferroelectric thin layers. High quality thin layers are produced. The crystallisation with perovskite structure is accelerated.