Auf einem piezoelektrischem Hochfrequenzelement montierte Kathode.
摘要
<p>A piezoelectric crystal (3) without spontaneous polarization such as Li2B4O7 or quartz crystal is jointed to a cathode on the side opposite to the tip (1) thereof to finely drive the cathode. The surface observation apparatus mounting the cathode makes it possible to observe the surface of a sample (4) at high speeds.</p>
申请公布号
DE3786955(T2)
申请公布日期
1994.03.24
申请号
DE19873786955T
申请日期
1987.05.08
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
AIDA, TOSHIYUKI, CHOFU-SHI TOKYO, JP;TAKEUCHI, HIROSHI, MATSUDO-SHI CHIBA-KEN, JP;HOSAKA, SUMIO, NISHITAMA-GUN TOKYO, JP;HOSOKI, SHIGEYUKI, HACHIOUJI-SHI TOKYO, JP;IKEDA, TADASHI, TSUKUI-GUN KANAGAWA-KEN, JP
