发明名称 |
Method for cutting a wafer hard to cut. |
摘要 |
A method for cutting a wafer hard to cut into sections comprising steps of scribing the wafer so as to form a groove along a cutting line, drilling bores on the grooves at proper intervals and breaking the wafer along the groove. <IMAGE> |
申请公布号 |
EP0588681(A1) |
申请公布日期 |
1994.03.23 |
申请号 |
EP19930402116 |
申请日期 |
1993.08.30 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
NAKAMURA, TAKAO |
分类号 |
B28D5/00;H01L21/301;H01L21/304;H01L39/24 |
主分类号 |
B28D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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