| 摘要 |
<p>PURPOSE:To provide the subject device capable of easily fixedly fitting substrates of various sizes dispensing with jigs such as a spin cup or holding arm for each size of substrates, resulting in neither decline in production efficiency nor cost raising even in the case of small-lot production with multiple product kinds. CONSTITUTION:The kink angles for the respective arm members 30, 31 of a pair of kinked arms 25 are altered corresponding to the change in the size of a substrate 13, and a plate 26 at the base end of each of the arm 25 is moved to an arbitrary position. The plate 26 is fixed at a specified angle at an arbitrary position. The substrate 13 is put on a support 27 on the plate 26 along with holding the corner of the substrate 13 of corresponding size by a guide pin 28. A spin cup 21 is put to rotary driving to rotate the substrate 13 fixed by the plate 26, thus carrying out various treatments such as washing and drying.</p> |
