| 摘要 |
PURPOSE:To cut down the use quantity of chemicals and to reduce the load of a waste water treatment device by returning the recovered water from a concentrator and an evaporation-to- dryness device after using super pure water, the low boiling point components in diluted waste water after treatment and the recovered water of the concentrated water of a multieffect evaporator and a low boiling component treatment device, to a primary water purifying apparatus for recycling. CONSTITUTION:High temperature super pure water is produced by primary and secondary water purifying apparatuses 1, 2. And the concentrated waste water after using super pure water is concentrated by a multieffect evaporator 5 and given solidifying treatment by an evaporation-to-dryness device 6 and the recovered water leaving the concentrator 5 and evaporation-to-dryness device 6 is returned to the primary water purifying apparatus 1 for recycling. And after low boiling point components in diluted waste water after using super pure water is treated, if necessary, by a low boiling point component treatment device 7 where the cooling of the waste water due to a self-evaporation process is performed, they are returned to the primary water purifying apparatus for recycling. And after the concentrated water of the multieffect evaporator 5 and the properly installed low boiling point component treatment device 7 is cooled in the treating process, the water is deprived of inorganic ions by an ion exchanger 8 and the recovered water is returned to the primary water purifying apparatus 1 for recycling. |
