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发明名称
POSITION DETECTOR
摘要
申请公布号
JPH0682215(A)
申请公布日期
1994.03.22
申请号
JP19930024441
申请日期
1993.02.12
申请人
NIKON CORP
发明人
MIZUTANI HIDEO
分类号
G01B9/02;G01B11/00;G03F9/00;(IPC1-7):G01B11/00
主分类号
G01B9/02
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代理人
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