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发明名称
VACUUM DEPOSITION METHOD
摘要
申请公布号
JPH0681136(A)
申请公布日期
1994.03.22
申请号
JP19920234717
申请日期
1992.09.02
申请人
ISHIKAWAJIMA HARIMA HEAVY IND CO LTD
发明人
KAWASAKI YOSHINORI;SHIRAKAWA TADAHIDE;NEHASHI KIYOSHI;MATSUDA SHIKO
分类号
C23C14/30;C23C14/56;(IPC1-7):C23C14/30
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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