发明名称 WORK CONVEYANCE PROCESS LINE
摘要 <p>PURPOSE:To shorten the whole length of a line and reduce the number of parts in a work conveyance process line. CONSTITUTION:The first work sequencing switching part 10a is provided on the way of a plurality of processes which are aligned in a prescribed order from a loader part 1 to an unloader part 9 works for one-line conveyance are plurally aligned in parallel so as to form a plurality of rows and then are subjected to conveyance process and the second work sequencing switching part 10b is provided on an area where a prescribed umber of process are progressed so that the works for plurality-row conveyance are aligned in series one by one for forming one line so as to carry out conveyance process. Thus the total length TL of the line can be shortened and reduction of process tanks can reduce the number parts.</p>
申请公布号 JPH0680242(A) 申请公布日期 1994.03.22
申请号 JP19920260538 申请日期 1992.09.04
申请人 HITACHI ELECTRON ENG CO LTD 发明人 KOZUKA TOSHIYUKI;KATO KAZUHIRO;ASAMI KOICHI
分类号 B23Q7/16;B65G47/30;B65G47/68;B65G47/80;B65H9/00;B65H9/08;H01L21/677;H01L21/68;(IPC1-7):B65G47/68 主分类号 B23Q7/16
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