| 摘要 |
PURPOSE:To enable a relative three-dimensional scanning of a detection chip for the surface of a sample even when the sample is large or heavy by using a fine adjusting element which does not to support the sample. CONSTITUTION:A finely adjusting element 4 for three-dimensional scanning to examine the surface of a sample 1 is provided with a fine spring element 3 with a detection chip 2 at an end part thereof so that the element is caused to approach the surface of the sample 1, a displacement detection means which irradiates spring surface of the fine spring element 3 with light to detect the displacement of the spring element 3 by detecting the reflection of the light. |
