| 摘要 |
PURPOSE:To execute a work for forming a nozzle of the ink jet head by forming a through-hole on a photosensitive glass base plate without generating a burr and chipping by using irradiation of an excimer laser. CONSTITUTION:On the face of the opposite side to the side for radiating an excimer laser 100 on a photosensitive glass base plate 10, a quartz glass plate 24 is fixed, absorption of heat and catching of a shock are executed, and generation of a burr and chipping in an emitting port part being in a penetration work completion stage by an exceimer laser is prevented effectively. In this regard, according to other invention, formation of a through-hole by the excimer laser 100 is suspended in a stage of a recessed part of prescribed depth, the face of the other side is eliminated by grinding or irradiation of the excimer laser in the same way and the recessed part becomes a through-hole. Accordingly, since formation (complete penetration) of the emitting port part by the excimer laser is avoided, generation of a burr and chipping is also avoided effectively. |
