| 摘要 |
<p>PURPOSE:To decompose and remove by chemical reaction hydrogen bromide, hydrogen chloride, bromine and chlorine which are coexistent in a process for removing NF3. CONSTITUTION:A hydrogen bromide removal agent is composed of at least one chemical selected from calcium oxide and magnesium oxide. In addition, a removal process consisting of a combination of more than one type selected from among calcium hydroxide, sodium hydroxide, potassium hydroxide and magnesium hydroxide and more than one type selected from zeolite and silica gel is provided in the prestage of a process for removing NF3. In addition, a hydrogen bromide removal part detects the inflow of hydrogen bromide by a temperature rise. Further, it is possible to detect the life of a removal agent of hydrogen bromide by arranging a substance which discolors through chemical reaction with hydrogen bromide in a window part provided on part of the hydrogen bromide removal part.</p> |
