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发明名称
FORMATION OF FINE PATTERN
摘要
申请公布号
JPH0681172(A)
申请公布日期
1994.03.22
申请号
JP19920233641
申请日期
1992.09.01
申请人
HITACHI CABLE LTD
发明人
TAGA KATSUTOSHI;OKABE NORIO
分类号
C23F1/00;H05K3/06;(IPC1-7):C23F1/00
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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