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发明名称
PRODUCTION OF SPUTTERING DEVICE AND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0681140(A)
申请公布日期
1994.03.22
申请号
JP19920235816
申请日期
1992.09.03
申请人
FUJITSU LTD
发明人
YAMANE SHUICHI
分类号
C23C14/34;H01L21/28;H01L21/285;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
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