发明名称 METHOD FOR DEPOSITION OF METAL BY LASER
摘要 Precise, adherent deposits of a metal such as palladium are formed on an substrate such as polyimide, silicon dioxide, tantalum oxide and polyethylene terephthalate by contacting the substrate surface with a solution of the metal, and then exposing the surface through the solution to laser radiation characterized by a wavelength absorbable by the substrate and a power density and fluence effective to release electrons to promote deposition of the metal onto the substrate without thermal activation of the substrate or the solution.
申请公布号 JPH0681153(A) 申请公布日期 1994.03.22
申请号 JP19930005668 申请日期 1993.01.18
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 BODEIRU ERIZABESU BURAREN;YUUJIEENU JIYON MERII OOSARIBAN;AREJIYANDORO JII SHIYUROTSUTO
分类号 B23K26/00;B23K26/12;C23C18/14;H01L21/3205;H05K3/18;(IPC1-7):C23C18/14 主分类号 B23K26/00
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