发明名称 |
METHOD FOR DEPOSITION OF METAL BY LASER |
摘要 |
Precise, adherent deposits of a metal such as palladium are formed on an substrate such as polyimide, silicon dioxide, tantalum oxide and polyethylene terephthalate by contacting the substrate surface with a solution of the metal, and then exposing the surface through the solution to laser radiation characterized by a wavelength absorbable by the substrate and a power density and fluence effective to release electrons to promote deposition of the metal onto the substrate without thermal activation of the substrate or the solution. |
申请公布号 |
JPH0681153(A) |
申请公布日期 |
1994.03.22 |
申请号 |
JP19930005668 |
申请日期 |
1993.01.18 |
申请人 |
INTERNATL BUSINESS MACH CORP <IBM> |
发明人 |
BODEIRU ERIZABESU BURAREN;YUUJIEENU JIYON MERII OOSARIBAN;AREJIYANDORO JII SHIYUROTSUTO |
分类号 |
B23K26/00;B23K26/12;C23C18/14;H01L21/3205;H05K3/18;(IPC1-7):C23C18/14 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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