| 摘要 |
PCT No. PCT/GB90/01071 Sec. 371 Date Jan. 14, 1992 Sec. 102(e) Date Jan. 14, 1992 PCT Filed Jul. 12, 1990 PCT Pub. No. WO91/01514 PCT Pub. Date Feb. 7, 1991.Apparatus for excimer laser image protection ablation of a target material comprising a projection lens system for projecting a mask pattern to be ablated onto the target, which lens system is telecentric towards the image (target) end of the projection path, and means for moving the target along the projection path whereby in use the size of the projected image areas to be ablated from the target is adjusted substantially without altering their relative portions of the target.
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