| 摘要 |
PURPOSE:To enable a process where a pellet is bonded to a lead frame by thermocompression to be shortened in processing time. CONSTITUTION:A plurality thermocompression bonding stations are provided. On one hand, the position of a pellet 15 is corrected and a preliminary compression bonding of the pellet 15 to a lead frame 16 is performed at a preliminary compression bonding station. On the other hand, another lead frame 16 after the preliminary compression bonding is further subjected to a compression bonding simultaneously at a final compression bonding station to make the bonding more complete. |
