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发明名称
SUBSTRATE
摘要
申请公布号
JPH0677347(A)
申请公布日期
1994.03.18
申请号
JP19920229785
申请日期
1992.08.28
申请人
TOSHIBA CORP
发明人
KUNO KATSUMI;OU ROHIN;MIZUKAMI HIROSHI;IWASAKI HIDEO
分类号
H01L23/12;(IPC1-7):H01L23/12
主分类号
H01L23/12
代理机构
代理人
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地址
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