摘要 |
<p>PURPOSE:To provide a manufacturing method of laminated piezoelectric element capable of cutting down the manufacturing cost thereof not requiring of so strict green sheet control. CONSTITUTION:Green sheets are baked to form ceramic sheets. Next, the ceramic sheets are polished to form a glass layer containing an electrode material by coating one main surface of the ceramic sheets with the electrode material containing glass frit. Furthermore, the glass layer is baked to bond multiple ceramic sheets for the formation of a laminated body. Next, the multiple ceramic sheets are polarization-processed. Besides, the formation step of electrode on both main surfaces of the ceramic sheets may be contained after the polishing step of the ceramic sheets but before the formation step of the glass layer containing the electrode material. On the other hand, the thickness of the glass layer containing the electrode material not exceeding 10mum is preferable.</p> |