| 摘要 |
PURPOSE:To provide the active type waveguide exhibiting a nonlinear optical effect and functional characteristics, such as oscillation and amplification of a laser, by introducing an optical waveguide layer consisting of an optically functional high-polymer material to a part of a core. CONSTITUTION:The optical nonlinear high-polymer material is applied on a lower layer clad 1 and is dried to form a core lower layer part (optically functional part) 2. A core upper layer part 3 having the refractive index lower than the refractive index of the core lower layer part 2 and the thickness larger than the thickness thereof is formed on the core lower layer part 2. The two- layered core parts consisting of the upper and lower core layer parts 2, 3 are continuously worked by photolithography and dry etching, by which a ridge type optical waveguide structure is formed. Further, a high-polymer clad material having the same refractive index as the refractive index of the lower layer clad 1 is applied on the flanks and upper surface of the ridge type optical waveguide to form a clad part 4. Namely, the core lower layer part 2 bears the optical functionality and the core upper layer part 3 serves as an optical passive layer bearing light transmittability and workability. Both characteristics are thus compatibly obtd. |
