THERMOSENSITIVE CURRENT METER AND FLUIDIC FLOWMETER USING THE CURRENT METER

摘要

PURPOSE:To enable both the resistance value and heat radiation efficiency of a heating body to be concurrently controlled. CONSTITUTION:A heating body 2, a heating body temperature detector 3 and a fluid temperature detector 4 respectively based upon a heat resistance body are formed on a substrate 1. Also, an electrical insulation and protection layer 5 having higher thermal conductivity than the material of the substrate 1 is formed in such a way as covering the heating body 2, and the detectors 3 and 4, and physically separating the sections of the body 2 and the detector 3 from the section of the detector 4. Also, constitution is so made that the resistance values and heat generation amounts of the body 2, and the detectors 3 and 4 can be independently controlled.