| 摘要 |
<p>PURPOSE:To obtain a low cost heat sensing flow rate sensor with good response capability by providing a part of heating part of a flow velocity probe with a fluid space which is not diretly exposed to the fluid varying its velocity. CONSTITUTION:A heat sensing flow rate sensor is provided to a part of heating part of a flow velocity probe 3 with a fluid space which is not diretly exposed to the fluid varying its velocity. The heating part not diretly exposed to the fluid varying its velocity has no forced convection loss and quite a little heat is taken by the fluid compared with the part exposed to the fluid varying its velocity. Thus, the heating part not diretly exposed to the fluid varying its velocity is kept at higher temperature than that without a wind shield 12. Even when the fluid flow rate varies, the variation of heat flow from a support base material 5 plated with heat sensing resister 6 to a holder 10 is small. Therefore, the heat time constant for heat balance state in the probe 3 and the holder 10 is shortened. By this, in the case of sudden change in fluid flow, the time for reaching the balance state of temperature corresponding to the velocity is short enough and the response capability as a flow rate sensor becomes good.</p> |
