| 摘要 |
<p>PURPOSE:To accurately measure values (such as the overlap deviation quantity, joint deviation quantity, pattern conversion quantity, etc., in the entire area of an element) of the display pattern part of the TFT pattern substrate of the liquid crystal display device. CONSTITUTION:This liquid crystal display device is constituted by forming a vernier pattern 2, with which the overlap deviation quantity of an actual pattern, etc., can directly be measured, inside a display pattern part (element area) over the entire element area. Thus, the vernier pattern 2 is formed inside (over the entire element area) the display pattern part, so the overlap deviation quantity of the actual pattern, etc., can directly be measured at any point of the whole display part and accurate correction data to be inputted to an exposing machine can be found.</p> |
