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发明名称
OPTICAL FILM THICKNESS MEASURING METHOD
摘要
申请公布号
JPH0674716(A)
申请公布日期
1994.03.18
申请号
JP19920254210
申请日期
1992.08.28
申请人
NIKON CORP
发明人
ISHII NOBUHITO
分类号
G01B11/06;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
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地址
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