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发明名称
METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0677474(A)
申请公布日期
1994.03.18
申请号
JP19930121256
申请日期
1993.05.24
申请人
MATSUSHITA ELECTRON CORP
发明人
YONEDA KENJI
分类号
H01L21/316;H01L21/22;H01L21/822;H01L27/04;H01L29/78;(IPC1-7):H01L29/784
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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