Phthalocyanine type gas sensor for trace gas determination - has passivation layer to prevent contamination of sensitive layer

摘要

A sensor, for selective gas determination in gas mixts. consists of a heating element applied on a substrate, a passivation layer completely covering the heating element and the exposed substrate, electrodes on the passivation layer, and an overlying sensitive coating of a phthalocyanine complex. The novelty is that (a) the passivation layer is an electrically insulating layer of cubic carbon and/or cubic boron nitride; and (b) the phthalocyanine complex is a mono- or di-phthalocyanine. USE/ADVANTAGE - For trace gas determination, e.g. in environmental or workplace protection. The passivation layer protects the sensitive layer against contamination by the substrate material and by the material of the passivation layer itself, so that the sensor has extended service life.