发明名称 Verwendung eines Gießharzes und Verfahren zu dessen Herstellung
摘要 A casting resin composed of 65 to 95 % by weight methylmethacrylate (MMA) with a dissolved solids content from 5 to 35 % by weight polymethylmethacrylate (PMMA), with at least 30000 molecular weight and a weight average Mw which does not exceed 1.3 . 10<6>, is used to produce a positive radiographic resist. A process is also disclosed for producing a radiographic resist, according to which a concentration of 0.2 to 0.4 % by weight azodiisobutyric acid dinitrile (AIBN) is used as initiator and a concentration of less than 0.1 % by weight mercaptane or a non-aromatic mercaptane derivate is used as regulator. The use of said casting resin and this production process allow radiographic resists to be obtained having improved microstructures after exposure to radiation and development.
申请公布号 DE4230297(C1) 申请公布日期 1994.03.17
申请号 DE19924230297 申请日期 1992.09.10
申请人 KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH, 76133 KARLSRUHE, DE;ROEHM GMBH, 64293 DARMSTADT, DE 发明人 EL-KHOLI, AIDA, DR., 7515 LINKENHEIM, DE;GOETTERT, JOST, 5481 SCHALKENBACH, DE;MOHR, JUERGEN, DR., 7519 SULZFELD, DE;KRIEG, MANFRED, DR., 6100 DARMSTADT, DE
分类号 C08F2/00;C08F2/38;C08F2/44;C08F2/54;C08F20/14;C08F220/10;C08F265/00;C08F265/06;G03F7/033;G03F7/039;(IPC1-7):G03F7/039;C08F120/18 主分类号 C08F2/00
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