Apparatus and method for producing diamond films at low temperatures.

摘要

A source (27) of free electrons is used to bombard a carbon block (26). Incident electronics vaporize the carbon surface, and free carbon atoms are ionized from collisions of the electrons with the carbon atoms. A collimating plate (16) located above the carbon block includes an aperture (17) for permitting the vaporized carbon ions to be collimated. On the other side of the collimating plate are first (18) and second (19) deflector plates, symmetrical with respect to the axis of the collimating plate aperture. A voltage potential therebetween produces an electrostatic field perpendicular to the axis of the aperture. Substrates (21, 22) located in the electrostatic field receive a carbon ion film which is essentially a diamond film structure.