ION BEAM DEPOSITION DEVICE,申请号JP19920228821-传众专利搜索

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发明名称	ION BEAM DEPOSITION DEVICE
摘要
申请公布号	JPH0673537(A)	申请公布日期	1994.03.15
申请号	JP19920228821	申请日期	1992.08.27
申请人	ISHIKAWAJIMA HARIMA HEAVY IND CO LTD	发明人	KUWABARA HAJIME
分类号	C23C14/32;C23C14/54;(IPC1-7):C23C14/32	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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