发明名称 Liquid coolant circulating system
摘要 According to this invention, a liquid coolant circulating system includes a cooling tank, a discharge pump, a recovery pump, a heat exchanger, a detector, and a controller. The cooling tank is filled with a liquid coolant for immersing an object to be cooled. The discharge pump is arranged on an inlet side of the cooling tank and supplies a liquid coolant to the cooling tank at a predetermined flow rate. The recovery pump is arranged on an outlet side of the cooling tank and recovers a liquid coolant from the cooling tank. The heat exchanger is arranged on an outlet side of the recovery pump and cools a heated liquid coolant to a predetermined temperature and supplies a cooled liquid coolant to the discharge pump. The detector detects a value related to a pressure in the cooling tank. The controller controls the ability of the recovery pump in response to a detection signal from the detector.
申请公布号 US5293754(A) 申请公布日期 1994.03.15
申请号 US19930032401 申请日期 1993.03.12
申请人 NEC CORPORATION 发明人 MIZUNO, TSUKASA
分类号 H01L23/44;H01L23/473;H05K7/20;(IPC1-7):F25D17/02;F28D15/00 主分类号 H01L23/44
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