| 摘要 |
<p>PURPOSE:To easily form a thin film in the atmosphere, and provide a liquid jet recording head with a high productivity and reliability, which can be manufactured at a low cost by a method wherein a heating resistant layer contained in an electro-thermal converter is formed by drying and sintering a paste of which the major component is an organic resinate. CONSTITUTION:A heat accumulating layer 102 is formed on a substrate 101, and an organic resinate which is diluted to a specified viscosity is applied on the top of the heat accumulating layer by a spin coater, and the heat accumulating layer 102 coated by the organic resinate is sintered under a specified condition to form a heating resistant layer 103. Then, a metal is formed into a film by vapor deposition, and a circuit pattern is formed by photolithography technique and is made to be an electrode layer 104. The heating resistant layer 103 between the electrodes becomes a heating part. A film is formed by a spatter on the top of the electrode layer 104, and is made to be a first protective layer 105, and in addition, a film is formed by a spatter on the top of the first protective layer 105, and a second protective layer 106 is formed into a bar-shaped pattern by photolithography technique. On the top of the second protective layer 106, a third protective layer 107 is formed to complete a heater board. In addition, on the top of the heater board, a specified nozzle passage, ink liquid chamber, ink feeding port, and discharge port are formed to complete the liquid jet recording head.</p> |
