| 摘要 |
PURPOSE:To provide a control method for a transfer device which can properly regulate the motion pattern of the transfer device automatically in a short time to a treated article supporting body being installed and obtain high reliability, and to transfer a treated article with positional relationship always kept proper to the treated article supporting body being installed. CONSTITUTION:In a control method for a transfer device 20 which transfers a treated article onto a treated article supporting body 21 to support a plate- shaped treated article, the treated article supporting body 21 is provided with position detecting plates T1, T2 similar to the treated article, and the transfer device 20 is moved to detect the positional informations of the position detecting plates T1, T2 to their reference positions through sensors SA, SB, and the motion of the transfer device 20 is controlled on the above positional informations. In a transfer method for the treated article, the transfer device 20 is equipped with a fork and a sensor arm 45, and the positions of the position detecting plats T1, T2 are detected through the sensor arm 45, and the position of the transfer device 20 is controlled on the above positional informations to transfer the treated article. |
