发明名称 Polysilazane precursors for silicon nitride and resultant products
摘要 A method of making a polysilazane comprising forming a reaction medium comprising at least one halomonosilane, an ammonium compound, and an organic solvent for said at least one halomonosilane, carrying out the reaction between said at least one halomonosilane and said ammonium compound in the absence of any catalyst, oxygen, and moisture at atmospheric pressure and at a temperature of about -80 degrees C. to 50 degrees C. for a time sufficient to form said polysilazane, and separating said polysilazane from said reaction medium.
申请公布号 US5294425(A) 申请公布日期 1994.03.15
申请号 US19910764793 申请日期 1991.09.24
申请人 SOUTHWEST RESEARCH INSTITUTE 发明人 SCHWAB, STUART T.
分类号 C01B21/068;C04B35/589;C08G77/62;(IPC1-7):C01B33/04 主分类号 C01B21/068
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