| 摘要 |
<p>PURPOSE: To recover a clean air by removing a cyclic alkylene carbonate by taking out an air containing cyclicaclkylene carbonate from process and passing it through an aqueous alkaline liquid in a gas scrubber. CONSTITUTION: Even through a cyclic alkylene carbonate, a propylene carbonate as an example, used as either or both of the developer or the stripper, has a low vapor pressure and a high boiling point, a vapor containing a propylene carbonate arises during a process of photolithography. By transferring an air containing the propylene carbonate to a gas scrubber 21 and bringing it into contact with an aqueous alkaline liquid, the propylene carbonate is removed by washing, and produce a clean air 15 and a solution 17 containing the propylene carbonate. The solution 17 may be sent to a circulation 18 or sent to the next process 18. Thus an air not containing substantially any propylene carbonate is recovered from the process.</p> |
