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发明名称
Verfahren zum Teilen von Halbleitermaterialscheiben
摘要
申请公布号
DE1216756(B)
申请公布日期
1966.05.12
申请号
DE1964J025106
申请日期
1964.01.10
申请人
VEB HALBLEITERWERK FRANKFURT/ODER
发明人
MOHR ULRICH
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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