| 摘要 |
PURPOSE:To easily form a solid electrolyte film having specified composition on a porous tube in a solid-electrolyte fuel cell by supplying gaseous O2 and a raw powder on the inner and outer faces of the tube in a fixed ratio at a constant differential pressure. CONSTITUTION:When a porous electrode substrate for the solidelectrolyte fuel cell is produced, a cylindrical single-cell substrate 4 as the electrode material is supported by a holder 5 in a reaction furnace 3 heated to about 1000 deg.C. Powdery ZrCl4 or YCl3 from a mixed powder feed part 1 are mixed in 84:16 weight ratio with gaseous Ar as the carrier gas, and the mixture is supplied to the furnace 3 along with carbon powder as a diluent. The carbon powder is collected and removed by a reticular collecting part, and the raw powder is supplied outside the substrate 4 and vaporized at high temp. Meanwhile, gaseous O2 contg. steam is supplied inside the substrate 4 through a manifold 10, and the ZrCl4 and YCl3 are oxidized respectively to ZrO2 and Y2O3 to vapor-deposit an ytteria (Y2O3)-stabilized zirconia (ZrO2) film on the substrate 4. |
