| 摘要 |
PURPOSE:To obtain a safe and excellent cleaning method without using Flon by forming a water layer on a specific uniformly mixed composition solution made by dissolving a specific total fluorinated hydrocarbons or total fluorinated ethers and hexamethyldisiloxane with each other and cleaning by a vapor obtained by heating the mixed composition solution. CONSTITUTION:In the cleaning method, the water layer is formed on the uniformly mixed composition solution made by dissolving the total fluorinated hydrocarbons or total fluorinated ethers having <100 deg.C b.p. and hexmethyldisiloxane with each other and having >=1 specific gravity and the cleaning by the vapor generated by heating the mixed composition solution at <100 deg.C is executed. That is, a mixed vapor of the mixed composition solution is generated through the water layer on the liquid surface and the vapor is condensed on the surface of a material to be cleaned placed on the liquid surface to execute vapor cleaning. In this case, though hexamethyldisiloxane is flammable, by heating the uniformly mixed composition solution formed by dissolving with each other, the nonflammable or flam-retardant vapor is obtained. |
