发明名称 Polycide local interconnect method and structure
摘要 A local interconnect comprises a doped, silicided amorphous or polysilicon layer 28. One interconnect 34, 35 extends between an isolated gate contact 60 and a source and drain 61 of an NMOS transistor 42. Another local interconnect 34,37 extends between a source and a drain 62, 63 of CMOS transistors.
申请公布号 US5294822(A) 申请公布日期 1994.03.15
申请号 US19930036124 申请日期 1993.03.17
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 VERRETT, DOUGLAS P.
分类号 H01L21/768;H01L27/092;(IPC1-7):H01L27/01;H01L27/02;H01L29/04;H01L23/48 主分类号 H01L21/768
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