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发明名称
INLET COVER UNIT FOR VERTICAL FURNACE
摘要
申请公布号
JPH0669146(A)
申请公布日期
1994.03.11
申请号
JP19920236338
申请日期
1992.08.13
申请人
TOKYO ELECTRON LTD
发明人
TAKAHASHI NOBUAKI
分类号
H01L21/22;(IPC1-7):H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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