DEPLETION SIMULATION DEVICE

摘要

PURPOSE:To automatically analyze the depleted state of a mono-pole impurities area based on a given impurities distribution of a semiconductor element. CONSTITUTION:A depletion simulation device 1 means an entire depletion simulation device. A depletion area recognizing device 2 recognizes the mono-pole impurities area that depletes itself. A virtual electrode setting device 3 determines a virtual electrode setting position and applies them to a given semiconductor element structure. A virtual element deletion device 4 restores it to the semiconductor element structure whose virtual electrode has been last. A depletion deciding device 5 decides whether depletion should be done considering the obtained electron/hole density distribution. A device simulation device 6 means a device simulation device using conventional technology.