发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To reduce the size of a memory cell by a method wherein a P-type channel transistor is replaced by a thin film transistor which is composed of polycrystalline silicon films and functions equivalently to the P-type channel transistor. CONSTITUTION:An N-type channel transistor is composed of an N<->-type diffused layer 31 which is a source connected to a (-) power supply Vss, an N<+>-type diffused layer 32 which is a drain and a polycrystalline silicon layer 20 which is a gate. On the other hand, a P-type channel transistor is composed of a source 55 connected to a (+) power supply VDD, a channel 54 and a drain 56 which are made from a polycrystalline silicon layer 22 and a gate made from the polycrystalline silicon layer 20. The respective drains 32 and 56 are connected to each other through a diode. With this constitution, the P-type channel transistor and the N-type channel transistor are so provided as to form layers and the size of a memory cell can be reduced.
申请公布号 JPH0669460(A) 申请公布日期 1994.03.11
申请号 JP19920036623 申请日期 1992.02.24
申请人 SEIKO EPSON CORP 发明人 MOROZUMI SHINJI
分类号 H01L21/8238;H01L21/8244;H01L27/092;H01L27/11;H01L29/78;H01L29/786 主分类号 H01L21/8238
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