| 摘要 |
PURPOSE:To obtain a pellicle which causes no color change into yellow nor cracking even when used in a short wavelength region by adhering a pellicle film consisting of a fluorine-base org. material to a pellicle frame with an adhesive consisting of a fluorine-base org. material. CONSTITUTION:This pellicle film consists of a fluorine-base org. material, and the adhesive used to adhere this pellicle film to a pellicle frame is the same kind or similar kind of the fluorine-base org. material of the film. The fluorine- base org. material is preferably an amorphous compd. having a cyclic structure. By adhering the pellicle film to the pellicle frame with the adhesive consisting of the same or similar kind of the fluorine-base org. material which constitutes the pellicle film, no peeling is caused. This adhesive has large adhesion strength and causes no deterioration by light, so that the pellicle film causes no peeling nor cracking due to changes in tensile strength. Thus, the pellicle can be used stably for a long time. |
