| 摘要 |
<p>PURPOSE:To obtain a probe device provided with a structure wherein the vibration, of a table, which is caused when its drive is stopped is suppressed and the time required for an inspection process can be shortened. CONSTITUTION:As a structure used to slide and move an X-Y table on which an object under test is mounted on a two-dimensional plane, a structure using a sliding and moving bearing 22 in which a turning and rolling member 20 has been arranged in a position faced with a rail 10 used to slide, move and guide the table is provided. A displacement member 24 which integrates the table with the guide rail 10 by pressurizing the turning and rolling member 20 to the side of the guide rail 10 when the movement of the table is stopped with reference to the turning and rolling member 20 is arranged on the side of the table.</p> |
