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发明名称
ELECTRON BEAM LITHOGRAPHY SYSTEM
摘要
申请公布号
JPH0669106(A)
申请公布日期
1994.03.11
申请号
JP19920217662
申请日期
1992.08.17
申请人
HITACHI LTD
发明人
MIYATA MASAYORI;YODA HARUO
分类号
H01L21/027;G03F7/20;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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