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发明名称
ELECTROSTATIC ACTUATOR
摘要
申请公布号
JPH0670554(A)
申请公布日期
1994.03.11
申请号
JP19920235388
申请日期
1992.08.11
申请人
DIAFOIL CO LTD;MITSUBISHI KASEI CORP;MITSUBISHI ELECTRIC CORP
发明人
KONNO SHINJI;AIDA TOMIO;HATABE ETSUO;NAGATA YOSHIHIRO;OZAKI YOSHIHIDE;SAKAMOTO SEIJI
分类号
H02N1/00;(IPC1-7):H02N1/00
主分类号
H02N1/00
代理机构
代理人
主权项
地址
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