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发明名称
THIN-FILM TRANSISTOR AND ITS MANUFACTURE
摘要
申请公布号
JPH0669503(A)
申请公布日期
1994.03.11
申请号
JP19920217928
申请日期
1992.08.17
申请人
SEIKO EPSON CORP
发明人
KITAZAWA YOSHIYUKI
分类号
H01L21/20;H01L21/336;H01L29/78;H01L29/786;(IPC1-7):H01L29/784
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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